|
轴系 Axis |
测试项目 Test Items |
单位 Units |
指标 Specification |
|
X 轴 X AXIS |
行程 Travel |
mm |
300 |
|
补偿后定位精度 Accuracy |
μm |
±0.5 |
|
|
双向重复定位精度 Bi-Dir Repeatability |
μm |
±0.1 |
|
|
微动步距 Min Incremental Motion |
μm |
1 |
|
|
直线度 Straightness |
μm |
±2 |
|
|
平面度 Flatness |
μm |
±2 |
|
|
俯仰 Pitch |
arc sec |
±20 |
|
|
偏摆 Yaw |
arc sec |
±10 |
|
|
稳定性Stability |
— |
1μm @4h |
|
|
速度 Speed |
mm/s |
10 |
|
|
Y 轴 Y AXIS |
行程 Travel |
mm |
300 |
|
补偿后定位精度 Accuracy |
μm |
±0.5 |
|
|
双向重复定位精度 Bi-Dir Repeatability |
μm |
±0.1 |
|
|
微动步距 Min Incremental Motion |
μm |
1 |
|
|
直线度 Straightness |
μm |
±2 |
|
|
平面度 Flatness |
μm |
±2 |
|
|
俯仰 Pitch |
arc sec |
±20 |
|
|
偏摆 Yaw |
arc sec |
±10 |
|
|
稳定性Stability |
— |
1μm @4h |
|
|
速度 Speed |
mm/s |
10 |
|
|
Z 轴 Z AXIS |
行程 Travel |
mm |
150 |
|
补偿后定位精度 Accuracy |
μm |
±0.5 |
|
|
双向重复定位精度 Bi-Dir Repeatability |
μm |
±0.1 |
|
|
微动步距 Min Incremental Motion |
μm |
1 |
|
|
直线度 Straightness |
μm |
±2 |
|
|
平面度 Flatness |
μm |
±2 |
|
|
俯仰 Pitch |
arc sec |
±20 |
|
|
偏摆 Yaw |
arc sec |
±10 |
|
|
稳定性Stability |
— |
1μm @4h |
|
|
速度 Speed |
mm/s |
10 |
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